Sheet Resistance Unit - ± 10% of nominal value: Web sheet resistance/resistivity is the resistance of a square of the conductive thin film with uniform thickness. Resistance drift (1,000 hr at 150°c in air) <1,000 ppm: The measurement unit typically used is ω/square. The number of squares is determined by the layout and is specified by the ic designer. −75±50 ppm/°c (typical), 0±25 ppm/°c with vacuum anneal: Resistor tolerance after anneal and laser trim: The sheet resistance is measured using the van der pauw technique with example test structures as shown in figure 2. Tcr tracking * <2 ppm:
Resistance drift (1,000 hr at 150°c in air) <1,000 ppm: The number of squares is determined by the layout and is specified by the ic designer. ± 10% of nominal value: Web sheet resistance/resistivity is the resistance of a square of the conductive thin film with uniform thickness. The measurement unit typically used is ω/square. Resistor tolerance after anneal and laser trim: The sheet resistance is measured using the van der pauw technique with example test structures as shown in figure 2. −75±50 ppm/°c (typical), 0±25 ppm/°c with vacuum anneal: Tcr tracking * <2 ppm: